Cold cryopumps in hot applications

David C. Planchard; Michael A. Grandinetti

Cold cryopumps in hot applications

David C. Planchard, Michael A. Grandinetti

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Résumé

Cryopumping represents a potential solution to most vacuum pumping problems. Vacuum engineers look to cryopumps to provide high pumping speed free from contamination. One major strength of cryopumps is that their operating mechanisms are completely isolated from the interior of the vacuum chamber, which results in a truly contamination-free pumping system.

langue originale	Anglais
Pages (de - à)	373-383
Nombre de pages	11
journal	Proceedings, Annual Technical Conference - Society of Vacuum Coaters
état	Publié - 1 déc. 1988
Modification externe	Oui
Evénement	Proceedings of the 31st Annual Technical Conference of the Society of Vacuum Coaters - San Francisco, CA, USA Durée: 2 mai 1988 → 6 mai 1988

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Contient cette citation

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title = "Cold cryopumps in hot applications",

abstract = "Cryopumping represents a potential solution to most vacuum pumping problems. Vacuum engineers look to cryopumps to provide high pumping speed free from contamination. One major strength of cryopumps is that their operating mechanisms are completely isolated from the interior of the vacuum chamber, which results in a truly contamination-free pumping system.",

author = "Planchard, {David C.} and Grandinetti, {Michael A.}",

year = "1988",

month = dec,

day = "1",

language = "English",

pages = "373--383",

journal = "Proceedings, Annual Technical Conference - Society of Vacuum Coaters",

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note = "Proceedings of the 31st Annual Technical Conference of the Society of Vacuum Coaters ; Conference date: 02-05-1988 Through 06-05-1988",

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AU - Planchard, David C.

AU - Grandinetti, Michael A.

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N2 - Cryopumping represents a potential solution to most vacuum pumping problems. Vacuum engineers look to cryopumps to provide high pumping speed free from contamination. One major strength of cryopumps is that their operating mechanisms are completely isolated from the interior of the vacuum chamber, which results in a truly contamination-free pumping system.

AB - Cryopumping represents a potential solution to most vacuum pumping problems. Vacuum engineers look to cryopumps to provide high pumping speed free from contamination. One major strength of cryopumps is that their operating mechanisms are completely isolated from the interior of the vacuum chamber, which results in a truly contamination-free pumping system.

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JO - Proceedings, Annual Technical Conference - Society of Vacuum Coaters

JF - Proceedings, Annual Technical Conference - Society of Vacuum Coaters

T2 - Proceedings of the 31st Annual Technical Conference of the Society of Vacuum Coaters

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ER -